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Read about the selected research topic. SRT15i Metrology of small structures for the manufacturing of electronic and optical devices

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Date
Name Institute Statement of capabilities/facilities Statement of researcher
experience
2010-07-05 Marijn van Veghel VSL VSL is currently developing a long-range AFM together with TU Eindhoven and will extend the capabilities of this AFM to 3D as part of the JRP.


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